As we know ZYGO continues to maintain the leadership role in surface form metrology using laser interferometry. It main measure radius of curvature, surface fringe and transmission wavefront distortion. Meanwhile, it can improve the accuracy and repeatability of the inspection process. Mainly for the flat surface, sphere, cylinder and so on.
Assuring the high surface accuracy, arrived λ/20
Main measure the focal length and centration. Automatic measurement, high efficiency of measurement;High accuracy, powerful function, wide range of measurement.
Effective focal length measurement
Center centration measurement: Prism angle master, any two angle
Effort Focal Length (EFL)
Measurement range (mm)
±5 ~ ±450
-450 ~ +450
0.03% ~ 0.3%
Video measuring machine
Be able to measure the dimensions, angles and positions of various workpieces efficiently. The geometrical parameters of cutter, measuring tool and measuring tool.
Prism angle master, any two angle tolerance<1~2”
Travel (mm) X x Y x Z
X, Y accuracy: (3+L/200) μm
1. The classical Czerny-Turner optical structure, simple, high precision and good spectral resolution
2. The design of double grating and double receiver ensures that the instrument working band can cover the full range of ultraviolet visible and near infrared region (uv-vis-nir).